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Product Please select product... Copper, 200 mm, 000CUR000 Copper, 200 mm, 000CUR009 Copper, 200 mm, 000CUR049 Copper, 200 mm, 000CUR051 Copper, 200 mm, 000CUR071 Copper, 200 mm, 000CUR095 Copper, 200 mm, 000CUR100 Copper, 300 mm, 000CUR316 Copper, 300 mm, 000CUR317 Copper, 300 mm, 000CUR329 Copper, 300 mm, 000CUR332 Copper, 300 mm, 000CUR335 Copper, 300 mm, 000MET312 LowK, 200 mm, 000BDM000 LowK, 200 mm, 000CVD114 LowK, 300 mm, 000ULK302 Metals, 200 mm, 000CMP000 Metals, 200 mm, 000MET096 Metals, 300 mm, 000MET302 PECVD, 200 mm, 000CVD080 PECVD, 200 mm, 000CVD097 PECVD, 200 mm, 000CVD111 PECVD, 300 mm, 000CVD339 PECVD, 300 mm, 000CVD376 PECVD, 300 mm, 000CVD377 PECVD, 300 mm, 000CVD397 Thermal, 200 mm, 000DIF002 Thermal, 200 mm, 000DIF119 Thermal, 200 mm, 000DIF152 Thermal, 300 mm, 000DIF300 Thermal, 300 mm, 000DIF318 Thermal, 300 mm, 000DIF334 Thermal, 300 mm, 000DIF337 Thermal, 300 mm, 000DIF341 Interconnect Unified Reticle set for ASML 193. 130nm node. CMP LowK and Copper Damascene Reticle STI Test Reticle. Minimum feature size is 130nm Trench. 248nm Dual Damascene Electrical Test Reticle Damascene/CMP Test Reticle SAC/SALI/Bi-level CMP LowK and Copper Damascene Reticles (MIT) Planarization Distance Reticle MIT STI CMP Test Reticle MSIII Alternating Phase Shift Reticle MSIII Phase Shift Contact Reticle Quick Cleave Reticle - Dense and isolated lines with varying pitches, smallest line is 0.13 µm Quick Cleave Reticle - Dense and isolated contacts with varying pitches, smallest contact is .16 µm Quick Cleave Binary line/space poly reticle. Dense and iso lines at varying pitches Quick Cleave Binary via reticle. Dense and iso vias at varying pitches, smallest via is 0.12 µm 248nm Dual Damascene Reticle Dual Damascene CMP Development Dual Damascene ETCH Development MIT STI CMP Test Reticle Alternating Phase Shift Reticle - Dense and isolated lines with varying pitches Attenuated Phase Shift Reticle. Vias at varying pitches

Wafer Quantity

Wafer Size 200mm    300mm

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Order Instructions

Will the silicon be supplied by SVTC? Yes    No*