Module Performance Kits
Module Specific, Turnkey Independent Solutions
SVTC is proud to introduce the industry's first set of Module Performance Kits for Etch and CMP development. The SVTC kits provide world class blanket and patterned test wafers with integrated pre and post Analysis to help you evaluate and improve your module performance.
As your direct source for wafer and analytical solutions, SVTC kits are competitively priced with a strong emphasis on cycle time, helping you get affordable, quality services - FAST.
To order an SVTC Module Performance Kit please contact us at 512-356-2000 and ask for Wafer Services or you can email us at waferservices@svtc.com.
Overview
Etch Module Performance Kit
CMP Module Performance Kit
Metrology/Analysis Services
Module Kit Options
Etch Module Performance Kit
CMP Module Performance Kit
Overview
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| Function |
Process Function |
Metrology |
Analysis |
Conformance |
Silicon |
Shipping |
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1) Monitor for Etch CDs, Bias, Wafer Uniformity and Etch Rates.
2) Equipment and Process Development Tool for Targeting New Process Requirement
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Film Type
Film Thickness
Line Width
Resist or Hardmask |
X-Section SEM, CDs and Profile Measurements |
Integrated Engineering Support |
Pre & Post Measurements Included |
Included |
Included |
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| Function |
Process Function |
Metrology |
Analysis |
Conformance |
Silicon |
Shipping |
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1) Monitor for Polish Rate, Erosion, Dishing, and Uniformity
2) Equipment and Process Development Tool for Targeting New Process Requirement
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Dielectric or Cu Damascene
Line Width |
Selectivity Check
Erosion/Dishing
X-Wafer Measure |
Integrated Engineering Support |
Pre & Post Measurements Included |
Included |
Included |
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Metrology/Analysis Services
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| Analysis Package |
Blanket Wafers |
CD Measure |
Film Thickness |
Cross Section |
| ETCH |
Pre and Post Customer Process 49pt Contour Map |
1) 9 site across wafer 2) Up to 3 structures including line, space, line edge roughness, depth |
9 to 20 site across wafer thinkness |
Up to 2 site SEM X-sections, center/edge |
| CMP |
Pre and Post Customer Process 49pt Contour Map for Polish rate and Selectivity |
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1) 9 to 20 site across wafer thickness 2) 3 site dishing/erosion profilometry |
Up to 2 site SEM X-sections. Void checks |
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Module Performance Kit Options
SVTC offers Etch and CMP Module Performance Kits with a variety options to fit your needs. Our Technical Account Representatives can help you determine the best kit to help you evaluate your module performance. All of our kits also include metrology services to provide you with world-class pre and post analysis from our labs at SVTC.
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Etch Module Performance Kit Options
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| SKU# |
Kit |
Film 1 |
Film 2 |
Film 3 |
Other Wafers in Kit |
Recommended Masks |
Metrology |
| ETCH01 |
Si Etch Kit |
STI=100A
Oxide + 1500A Nitride
10K PECVD Oxide |
Resist |
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Blanket Nitride (STI)
Blanket Ox
Blanket Resist |
STI Mask-484
MEMS Mask-1X |
Thickness
CD X-Section |
| ETCH02 |
Oxide/Nitride
Etch Kit |
10K PECVD Oxide
or
1K PECVD Nitridde |
Resist |
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Blanket Ox
or NiT
Blanket Resist |
Damascene - 454
QCE Mask |
Thickness
CD X-Section |
| ETCH03 |
Basic Poly Etch |
5.5K Thermal Oxide |
1K Poly |
Resist |
Blanket Poly
Blanket Ox |
QCD
AMAG4L |
Thickness
CD X-Section |
| ETCH04 |
Hard Mask Poly |
5.5K Thermal Oxide |
1K Poly |
Etched Hard Mask 1K PECVD Nitride |
Blanket Hard Mask
Blanket Poly |
QCD
AMAG4L
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Thickness
CD X-Section |
| ETCH05 |
Metal Etch Kit - 200mm Kit |
10K
PECVD
Oxide |
Ti or TiN (100 to 2K) + Al (1K to 10K)+Ti or TiN (100 to 2K) |
Resist |
Blanket Metal Stack |
QCCD |
Thickness
CD X-Section |
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CMP Module Performance Kit Options
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| SKU# |
Kit |
Film 1 |
Film 2 |
Film 3 |
Other Wafers in Kit |
Recommended Masks |
Metrology |
| CMP01 |
Cu Damascene |
Patterned 5K PECVD Oxide |
Ta or TaN 250A + PVD Cu 1K + Plate Cu 10K |
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Blanket Oxide
Blanket Copper Stack
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CMP Mask - 454 |
Thickness
CD X-Section |
| CMP02 |
ILD - 200mm Only |
5K PECVD Oxide |
Patterned Metal
Ti or TiN (100 to 2K) + Al (1K to 10K) + Ti or TiN (100 to 2K) |
20K PECVD Oxide |
Blanket Ox |
QCD
AMAG4L |
Thickness
CD X-Section |
| CMP03 |
W Polish |
Patterened 5K PECVD Oxide |
Ti or TiN 250A + CVD W 8K |
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Blanket W
Blanket Ox |
CMP Mask - 454 QCE |
Thickness
CD X-Section |
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