Fabs & Facilities
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SVTC's state-of-the-art development and manufacturing facilities offer customers the following capabilities to help speed the transformation of semiconductor ideas and concepts into market-ready products:
- 200mm (8") & 300mm (12") Production-grade development equipment
- More than 250 process, metrology and analytical tools
- Support for introduction of novel materials and process architectures
- Process Library with more than 1,500 SPC-controlled recipes
- 85 nm electrical fab monitor and transistor characterization flow
- Cu and Al back-ends
- Advanced set of atomic layer deposition (ALD) and novel materials capabilities
- 65 nm lithography
Tools
In its two fab facilities, SVTC offers a wide range of 200 mm and 300 mm development tools, including:
- Lithography, including 193 nm high NA lithography
- Dry Etch
- Wet Etch/Clean
- Diffusion
- Thin Films
- CMP
- Metrology
- Implantation - Low, Medium and High Dose
- Failure Analysis
Analytical services
SVTC incorporates analytical services offerings with its existing technology development capabilities, thus extending its value throughout the growing ecosystem of emerging technology development. SVTC's analytical services are available at both its San Jose, California, and Austin, Texas, facilities.
SVTC equipment for analytical services includes:
- Atomic Force Microscopy (AFM)
- Auger-Electron Spectroscopy (AES)
- Focused Ion Beam (FIB)
- Dual-Beam FIB/SEM
- Secondary Ion Mass Spectrometry Low-Energy SIMS depth profiles
- Scanning Electron Microscopy (SEM)
- Scanning Transmission Electron Microscopy (STEM)
- Transmission Electron Microscopy (TEM)
- High-resolution TEM
- Vapor Phase Decomposition Inductively Coupled Plasma Mass Spectroscopy (VPD-ICP-MS)
